Epitaxial growth and piezoelectric properties of lithium niobate thin films
With the increasing volume of wireless communication globally, the demand for more sophisticated acoustic filter technologies to prevent signal interference has risen exponentially. A key component of acoustic filters is the piezoelectric film layer, and high-quality films are critical for high f...
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Format: | Final Year Project |
Language: | English |
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Nanyang Technological University
2023
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Online Access: | https://hdl.handle.net/10356/167704 |
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Institution: | Nanyang Technological University |
Language: | English |
Summary: | With the increasing volume of wireless communication globally, the demand for
more sophisticated acoustic filter technologies to prevent signal interference has
risen exponentially. A key component of acoustic filters is the piezoelectric film
layer, and high-quality films are critical for high filter performance. This report
studies the relevant parameters involved in the thin film deposition of a piezoelectric
material, LiNbO3. The ideal conditions for the synthesis of a ceramic target are
reported to include 3.5% of K2O in the solid-state synthesis process, while a sintering
temperature of 900℃ yielded the highest ceramic density. This ceramic target was
used to produce thin film samples, among which films deposited on LiTaO3
substrates yielded the highest uniformity. Ultimately, SAW devices were constructed
onto the thin film samples and their resonance behavior was compared with SAW
devices on bulk LiNbO3 crystals to observe their potential for applications in acoustic
filter devices. |
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