Epitaxial growth and piezoelectric properties of lithium niobate thin films

With the increasing volume of wireless communication globally, the demand for more sophisticated acoustic filter technologies to prevent signal interference has risen exponentially. A key component of acoustic filters is the piezoelectric film layer, and high-quality films are critical for high f...

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Main Author: Lee, Chaeeun
Other Authors: Lam Yeng Ming
Format: Final Year Project
Language:English
Published: Nanyang Technological University 2023
Subjects:
Online Access:https://hdl.handle.net/10356/167704
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1677042023-06-03T16:45:53Z Epitaxial growth and piezoelectric properties of lithium niobate thin films Lee, Chaeeun Lam Yeng Ming School of Materials Science and Engineering A*STAR Institute of Material Research and Engineering Liu Huajun YMLam@ntu.edu.sg, liu_huajun@imre.a-star.edu.sg Engineering::Materials With the increasing volume of wireless communication globally, the demand for more sophisticated acoustic filter technologies to prevent signal interference has risen exponentially. A key component of acoustic filters is the piezoelectric film layer, and high-quality films are critical for high filter performance. This report studies the relevant parameters involved in the thin film deposition of a piezoelectric material, LiNbO3. The ideal conditions for the synthesis of a ceramic target are reported to include 3.5% of K2O in the solid-state synthesis process, while a sintering temperature of 900℃ yielded the highest ceramic density. This ceramic target was used to produce thin film samples, among which films deposited on LiTaO3 substrates yielded the highest uniformity. Ultimately, SAW devices were constructed onto the thin film samples and their resonance behavior was compared with SAW devices on bulk LiNbO3 crystals to observe their potential for applications in acoustic filter devices. Bachelor of Engineering (Materials Engineering) 2023-06-01T07:55:53Z 2023-06-01T07:55:53Z 2023 Final Year Project (FYP) Lee, C. (2023). Epitaxial growth and piezoelectric properties of lithium niobate thin films. Final Year Project (FYP), Nanyang Technological University, Singapore. https://hdl.handle.net/10356/167704 https://hdl.handle.net/10356/167704 en application/pdf Nanyang Technological University
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Engineering::Materials
spellingShingle Engineering::Materials
Lee, Chaeeun
Epitaxial growth and piezoelectric properties of lithium niobate thin films
description With the increasing volume of wireless communication globally, the demand for more sophisticated acoustic filter technologies to prevent signal interference has risen exponentially. A key component of acoustic filters is the piezoelectric film layer, and high-quality films are critical for high filter performance. This report studies the relevant parameters involved in the thin film deposition of a piezoelectric material, LiNbO3. The ideal conditions for the synthesis of a ceramic target are reported to include 3.5% of K2O in the solid-state synthesis process, while a sintering temperature of 900℃ yielded the highest ceramic density. This ceramic target was used to produce thin film samples, among which films deposited on LiTaO3 substrates yielded the highest uniformity. Ultimately, SAW devices were constructed onto the thin film samples and their resonance behavior was compared with SAW devices on bulk LiNbO3 crystals to observe their potential for applications in acoustic filter devices.
author2 Lam Yeng Ming
author_facet Lam Yeng Ming
Lee, Chaeeun
format Final Year Project
author Lee, Chaeeun
author_sort Lee, Chaeeun
title Epitaxial growth and piezoelectric properties of lithium niobate thin films
title_short Epitaxial growth and piezoelectric properties of lithium niobate thin films
title_full Epitaxial growth and piezoelectric properties of lithium niobate thin films
title_fullStr Epitaxial growth and piezoelectric properties of lithium niobate thin films
title_full_unstemmed Epitaxial growth and piezoelectric properties of lithium niobate thin films
title_sort epitaxial growth and piezoelectric properties of lithium niobate thin films
publisher Nanyang Technological University
publishDate 2023
url https://hdl.handle.net/10356/167704
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