Epitaxial growth and piezoelectric properties of lithium niobate thin films
With the increasing volume of wireless communication globally, the demand for more sophisticated acoustic filter technologies to prevent signal interference has risen exponentially. A key component of acoustic filters is the piezoelectric film layer, and high-quality films are critical for high f...
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sg-ntu-dr.10356-1677042023-06-03T16:45:53Z Epitaxial growth and piezoelectric properties of lithium niobate thin films Lee, Chaeeun Lam Yeng Ming School of Materials Science and Engineering A*STAR Institute of Material Research and Engineering Liu Huajun YMLam@ntu.edu.sg, liu_huajun@imre.a-star.edu.sg Engineering::Materials With the increasing volume of wireless communication globally, the demand for more sophisticated acoustic filter technologies to prevent signal interference has risen exponentially. A key component of acoustic filters is the piezoelectric film layer, and high-quality films are critical for high filter performance. This report studies the relevant parameters involved in the thin film deposition of a piezoelectric material, LiNbO3. The ideal conditions for the synthesis of a ceramic target are reported to include 3.5% of K2O in the solid-state synthesis process, while a sintering temperature of 900℃ yielded the highest ceramic density. This ceramic target was used to produce thin film samples, among which films deposited on LiTaO3 substrates yielded the highest uniformity. Ultimately, SAW devices were constructed onto the thin film samples and their resonance behavior was compared with SAW devices on bulk LiNbO3 crystals to observe their potential for applications in acoustic filter devices. Bachelor of Engineering (Materials Engineering) 2023-06-01T07:55:53Z 2023-06-01T07:55:53Z 2023 Final Year Project (FYP) Lee, C. (2023). Epitaxial growth and piezoelectric properties of lithium niobate thin films. Final Year Project (FYP), Nanyang Technological University, Singapore. https://hdl.handle.net/10356/167704 https://hdl.handle.net/10356/167704 en application/pdf Nanyang Technological University |
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Engineering::Materials Lee, Chaeeun Epitaxial growth and piezoelectric properties of lithium niobate thin films |
description |
With the increasing volume of wireless communication globally, the demand for
more sophisticated acoustic filter technologies to prevent signal interference has
risen exponentially. A key component of acoustic filters is the piezoelectric film
layer, and high-quality films are critical for high filter performance. This report
studies the relevant parameters involved in the thin film deposition of a piezoelectric
material, LiNbO3. The ideal conditions for the synthesis of a ceramic target are
reported to include 3.5% of K2O in the solid-state synthesis process, while a sintering
temperature of 900℃ yielded the highest ceramic density. This ceramic target was
used to produce thin film samples, among which films deposited on LiTaO3
substrates yielded the highest uniformity. Ultimately, SAW devices were constructed
onto the thin film samples and their resonance behavior was compared with SAW
devices on bulk LiNbO3 crystals to observe their potential for applications in acoustic
filter devices. |
author2 |
Lam Yeng Ming |
author_facet |
Lam Yeng Ming Lee, Chaeeun |
format |
Final Year Project |
author |
Lee, Chaeeun |
author_sort |
Lee, Chaeeun |
title |
Epitaxial growth and piezoelectric properties of lithium niobate thin films |
title_short |
Epitaxial growth and piezoelectric properties of lithium niobate thin films |
title_full |
Epitaxial growth and piezoelectric properties of lithium niobate thin films |
title_fullStr |
Epitaxial growth and piezoelectric properties of lithium niobate thin films |
title_full_unstemmed |
Epitaxial growth and piezoelectric properties of lithium niobate thin films |
title_sort |
epitaxial growth and piezoelectric properties of lithium niobate thin films |
publisher |
Nanyang Technological University |
publishDate |
2023 |
url |
https://hdl.handle.net/10356/167704 |
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1772827287688839168 |