Solidly mounted resonators with ultra-high operating frequencies based on 3R-MoS2 atomic flakes

• Main Authors: Yang, Yang, Sun, Jiayi, Cai, Weifan, Liu, Zheng, Dejous, Corinne, De Matos, Magali, Hallil, Hamida, Zhang, Qing
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2023
• Subjects: Engineering::Materials; Engineering::Electrical and electronic engineering; Piezoelectricity; Natural Frequencies
• Online Access: https://hdl.handle.net/10356/170070
• Institution: Nanyang Technological University

Conventional bulk and thin piezoelectric materials based film bulk acoustic resonators (FBARs) are facing an insurmountable challenge for millimetric frequency applications due to the poor piezoelectric properties of the materials when their thickness reaches the sub-micron regime. Novel FBARs for u...