Solidly mounted resonators with ultra-high operating frequencies based on 3R-MoS2 atomic flakes

Conventional bulk and thin piezoelectric materials based film bulk acoustic resonators (FBARs) are facing an insurmountable challenge for millimetric frequency applications due to the poor piezoelectric properties of the materials when their thickness reaches the sub-micron regime. Novel FBARs for u...

Full description

Saved in:
Bibliographic Details
Main Authors: Yang, Yang, Sun, Jiayi, Cai, Weifan, Liu, Zheng, Dejous, Corinne, De Matos, Magali, Hallil, Hamida, Zhang, Qing
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2023
Subjects:
Online Access:https://hdl.handle.net/10356/170070
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Nanyang Technological University
Language: English
id sg-ntu-dr.10356-170070
record_format dspace
spelling sg-ntu-dr.10356-1700702023-08-25T15:39:14Z Solidly mounted resonators with ultra-high operating frequencies based on 3R-MoS2 atomic flakes Yang, Yang Sun, Jiayi Cai, Weifan Liu, Zheng Dejous, Corinne De Matos, Magali Hallil, Hamida Zhang, Qing School of Electrical and Electronic Engineering School of Materials Science and Engineering Centre for Micro-/Nano-electronics (NOVITAS) Research Techno Plaza Engineering::Materials Engineering::Electrical and electronic engineering Piezoelectricity Natural Frequencies Conventional bulk and thin piezoelectric materials based film bulk acoustic resonators (FBARs) are facing an insurmountable challenge for millimetric frequency applications due to the poor piezoelectric properties of the materials when their thickness reaches the sub-micron regime. Novel FBARs for ultra-high working frequencies are in urgent demand to meet the requirements of the fast-growing 5/6G telecommunication techniques. Recent advances in 2D piezoelectric nanomaterials create an opportunity in this perspective. Here, the first FBAR chip based on 2D 3R-MoS2 ultrathin piezoelectric flakes with a solidly mounted resonator (SMR) architecture is reported. The typical resonant frequency for an SMR device based on ≈200 nm 3R-MoS2 flake reaches over 25 GHz with high reproducibility. Theoretical and finite element analysis suggest that the observed resonance is of longitudinal acoustic modes. This study demonstrates for the first time that the access to 2D piezoelectric nanomaterials makes high performance piezoelectric devices feasible for various promising applications including high-speed telecommunication, acousto-optic, and sensor fields,etc. Agency for Science, Technology and Research (A*STAR) Ministry of Education (MOE) Published version Y.Y. and J.S. equally contributed to this work. The authors acknowledge the financial supports: MOE AcRF Tier2 (2018-T2-2-005), Singapore; A*STAR AME IRG Grant SERC A1983c0027, Singapore; the “Investments for the future” Programme IdEx Bordeaux, under Grant ANR-10-IDEX-03-02 and NTU – CNRS “Excellence Science” Joint Research Program/Project REGENERATE. 2023-08-23T07:23:18Z 2023-08-23T07:23:18Z 2023 Journal Article Yang, Y., Sun, J., Cai, W., Liu, Z., Dejous, C., De Matos, M., Hallil, H. & Zhang, Q. (2023). Solidly mounted resonators with ultra-high operating frequencies based on 3R-MoS2 atomic flakes. Advanced Functional Materials, 33(29), 2300104-. https://dx.doi.org/10.1002/adfm.202300104 1616-301X https://hdl.handle.net/10356/170070 10.1002/adfm.202300104 2-s2.0-85152050433 29 33 2300104 en 2018-T2-2-005 A1983c0027 ANR-10-IDEX-03-02 Advanced Functional Materials © 2023 The Authors. Advanced Functional Materials published by Wiley-VCH GmbH. This is an open access article under the terms of the Creative Commons Attribution-NonCommercial License, which permits use, distribution and reproduction in any medium, provided the original work is properly cited and is not used for commercial purposes. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Engineering::Materials
Engineering::Electrical and electronic engineering
Piezoelectricity
Natural Frequencies
spellingShingle Engineering::Materials
Engineering::Electrical and electronic engineering
Piezoelectricity
Natural Frequencies
Yang, Yang
Sun, Jiayi
Cai, Weifan
Liu, Zheng
Dejous, Corinne
De Matos, Magali
Hallil, Hamida
Zhang, Qing
Solidly mounted resonators with ultra-high operating frequencies based on 3R-MoS2 atomic flakes
description Conventional bulk and thin piezoelectric materials based film bulk acoustic resonators (FBARs) are facing an insurmountable challenge for millimetric frequency applications due to the poor piezoelectric properties of the materials when their thickness reaches the sub-micron regime. Novel FBARs for ultra-high working frequencies are in urgent demand to meet the requirements of the fast-growing 5/6G telecommunication techniques. Recent advances in 2D piezoelectric nanomaterials create an opportunity in this perspective. Here, the first FBAR chip based on 2D 3R-MoS2 ultrathin piezoelectric flakes with a solidly mounted resonator (SMR) architecture is reported. The typical resonant frequency for an SMR device based on ≈200 nm 3R-MoS2 flake reaches over 25 GHz with high reproducibility. Theoretical and finite element analysis suggest that the observed resonance is of longitudinal acoustic modes. This study demonstrates for the first time that the access to 2D piezoelectric nanomaterials makes high performance piezoelectric devices feasible for various promising applications including high-speed telecommunication, acousto-optic, and sensor fields,etc.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Yang, Yang
Sun, Jiayi
Cai, Weifan
Liu, Zheng
Dejous, Corinne
De Matos, Magali
Hallil, Hamida
Zhang, Qing
format Article
author Yang, Yang
Sun, Jiayi
Cai, Weifan
Liu, Zheng
Dejous, Corinne
De Matos, Magali
Hallil, Hamida
Zhang, Qing
author_sort Yang, Yang
title Solidly mounted resonators with ultra-high operating frequencies based on 3R-MoS2 atomic flakes
title_short Solidly mounted resonators with ultra-high operating frequencies based on 3R-MoS2 atomic flakes
title_full Solidly mounted resonators with ultra-high operating frequencies based on 3R-MoS2 atomic flakes
title_fullStr Solidly mounted resonators with ultra-high operating frequencies based on 3R-MoS2 atomic flakes
title_full_unstemmed Solidly mounted resonators with ultra-high operating frequencies based on 3R-MoS2 atomic flakes
title_sort solidly mounted resonators with ultra-high operating frequencies based on 3r-mos2 atomic flakes
publishDate 2023
url https://hdl.handle.net/10356/170070
_version_ 1779156292815814656