Structural and tribological behaviours of silicon doped amorphous carbon films

• Main Authors: Sun, Kun, Sun, Mingjun, Chen, Cheng, Chen, Sicheng, Fan, Jinwei, Diao, Dongfeng
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2023
• Subjects: Engineering::Electrical and electronic engineering; Doped Silicon; Amorphous Carbon
• Online Access: https://hdl.handle.net/10356/171216
• Institution: Nanyang Technological University

We report on the structural evolution and low-friction behaviour of silicon (Si) doped amorphous carbon (a-C) films. Si-doped a-C films were fabricated by controlling the magnetron Si target currents under an electron cyclotron resonance (ECR) plasma system. Structural analysis indicated that Si ato...