Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

Temperature, pressure, and humidity SAW sensor based on coplanar integrated LGS

This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS2@G...

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Bibliographic Details
Main Authors: Liang, Xiaorui, Zhang, Lei, Tan, Qiulin, Cheng, Wenhua, Hu, Dan, Li, Shuang, Jing, Lin, Xiong, Jijun
Other Authors: School of Materials Science and Engineering
Format: Article
Language:English
Published: 2023
Subjects:
Engineering::Materials
Acoustic Waves
Etching
Online Access:https://hdl.handle.net/10356/171520
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Institution: Nanyang Technological University
Language: English
Description
Summary:This paper presents a surface acoustic wave (SAW) sensor based on coplanar integrated Langasite (LGS) that is fabricated using wet etching, high-temperature bonding, and ion beam etching (IBE) processes. The miniaturized multiparameter temperature‒pressure-humidity (TPH) sensor used the MXene@MoS2@Go (MMG) composite to widen the humidity detection range and improve the humidity sensitivity, including a fast response time (3.18 s) and recovery time (0.94 s). The TPH sensor was shown to operate steadily between 25-700 °C, 0-700 kPa, and 10-98% RH. Coupling issues among multiple parameters in complex environments were addressed by decoupling the Δf-temperature coupling factor to improve the accuracy. Therefore, this work can be applied to simultaneous measurements of several environmental parameters in challenging conditions.

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