Effect of external magnetic field on the preparation of nitrogen-doped diamond-like carbon films

Nitrogen-doped diamond-like carbon (DLC) films were prepared on quartz substrates and silicon wafers using the radio-frequency magnetron sputtering technique with high-purity graphite as the target material. Simultaneously, a permanent NdFeB magnet was placed on the substrate site to study the effec...

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Bibliographic Details
Main Authors: Du, Wenhan, Chen, Wangze, Gu, Yanxiang, Yang, Jingjing, Hu, Susu, Du, Xiaojiao, Zhang, Keke
Other Authors: School of Materials Science and Engineering
Format: Article
Language:English
Published: 2023
Subjects:
Online Access:https://hdl.handle.net/10356/171709
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Institution: Nanyang Technological University
Language: English