Rare earth materials for nanoelectronic applications

• Main Author: Lee, Pooi See.
• Other Authors: School of Materials Science & Engineering
• Format: Research Report
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Nanoelectronics and interconnects
• Online Access: http://hdl.handle.net/10356/17234
• Institution: Nanyang Technological University

This report details the workdone on using rare earth materials for nanoelectronics applications. The aspects covered include formation of rare earth oxides for thin gate dielectrics, formation of rare earth based nanocrystals into rare earth oxides. The second part deals with the formation of rare e...