Development of multi-spectral pyrometer for measuring cathode surface temperature of pulsed vacuum arc discharge
The cathode surface temperature is a vital parameter in the pulsed vacuum arc discharge process, which has an important influence on the formation of vacuum arc plasma, electrode corrosion prediction and ion source lifetime. Currently, the research of cathode surface temperature measurement is mainl...
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| Main Authors: | , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2024
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/173998 |
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| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | The cathode surface temperature is a vital parameter in the pulsed vacuum arc discharge process, which has an important influence on the formation of vacuum arc plasma, electrode corrosion prediction and ion source lifetime. Currently, the research of cathode surface temperature measurement is mainly based on a high-speed charge coupled instrument (CCD) camera. However, there are no other temperature measuring instruments to verify the results of a high-speed camera. For this reason, a new type of multi-spectral pyrometer is developed. The developed pyrometer adopts optical filter instead of traditional prism splitting, which simplifies the calibration process of pyrometer. An optical sampling system is redesigned to ensure that a tiny target of 100 μm can be measured. On the built experimental platform, the synchronous experiment of multi-spectral pyrometer and high-speed camera are carried out. The experimental results show that the developed multi-spectral pyrometer can verify the measurement results of the multi-spectral pyrometer based on high-speed camera. |
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