Review of metal oxide films deposited by filtered cathodic vacuum arc technique

Review of metal oxide films deposited by filtered cathodic vacuum arc technique

10.1016/j.mser.2006.04.003

Saved in:
Bibliographic Details
Main Authors: Tay, B.K., Zhao, Z.W., Chua, D.H.C.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Review
Published: 2014
Subjects:
Filtered cathodic vacuum arc
Metal oxides
Microstructure
Optical properties
Thin films
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68400
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/68400

Similar Items