Review of metal oxide films deposited by filtered cathodic vacuum arc technique

• Main Authors: Tay, B.K., Zhao, Z.W., Chua, D.H.C.
• Other Authors: MATERIALS SCIENCE AND ENGINEERING
• Format: Review
• Published: 2014
• Subjects: Filtered cathodic vacuum arc; Metal oxides; Microstructure; Optical properties; Thin films
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/68400
• Institution: National University of Singapore

10.1016/j.mser.2006.04.003