Review of metal oxide films deposited by filtered cathodic vacuum arc technique

Review of metal oxide films deposited by filtered cathodic vacuum arc technique

10.1016/j.mser.2006.04.003

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Bibliographic Details
Main Authors: Tay, B.K., Zhao, Z.W., Chua, D.H.C.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Review
Published: 2014
Subjects:
Filtered cathodic vacuum arc
Metal oxides
Microstructure
Optical properties
Thin films
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68400
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Institution: National University of Singapore
id sg-nus-scholar.10635-68400
record_format dspace
spelling sg-nus-scholar.10635-684002024-11-10T21:30:15Z Review of metal oxide films deposited by filtered cathodic vacuum arc technique Tay, B.K. Zhao, Z.W. Chua, D.H.C. MATERIALS SCIENCE AND ENGINEERING Filtered cathodic vacuum arc Metal oxides Microstructure Optical properties Thin films 10.1016/j.mser.2006.04.003 Materials Science and Engineering R: Reports 52 1-3 1-48 MIGIE 2014-06-18T06:12:55Z 2014-06-18T06:12:55Z 2006-05-30 Review Tay, B.K., Zhao, Z.W., Chua, D.H.C. (2006-05-30). Review of metal oxide films deposited by filtered cathodic vacuum arc technique. Materials Science and Engineering R: Reports 52 (1-3) : 1-48. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mser.2006.04.003 0927796X http://scholarbank.nus.edu.sg/handle/10635/68400 000238799100001 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Filtered cathodic vacuum arc
Metal oxides
Microstructure
Optical properties
Thin films
spellingShingle Filtered cathodic vacuum arc
Metal oxides
Microstructure
Optical properties
Thin films
Tay, B.K.
Zhao, Z.W.
Chua, D.H.C.
Review of metal oxide films deposited by filtered cathodic vacuum arc technique
description 10.1016/j.mser.2006.04.003
author2 MATERIALS SCIENCE AND ENGINEERING
author_facet MATERIALS SCIENCE AND ENGINEERING
Tay, B.K.
Zhao, Z.W.
Chua, D.H.C.
format Review
author Tay, B.K.
Zhao, Z.W.
Chua, D.H.C.
author_sort Tay, B.K.
title Review of metal oxide films deposited by filtered cathodic vacuum arc technique
title_short Review of metal oxide films deposited by filtered cathodic vacuum arc technique
title_full Review of metal oxide films deposited by filtered cathodic vacuum arc technique
title_fullStr Review of metal oxide films deposited by filtered cathodic vacuum arc technique
title_full_unstemmed Review of metal oxide films deposited by filtered cathodic vacuum arc technique
title_sort review of metal oxide films deposited by filtered cathodic vacuum arc technique
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/68400
_version_ 1821233863234420736

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