Review of metal oxide films deposited by filtered cathodic vacuum arc technique

Materials Science and Engineering R: Reports

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Bibliographic Details
Main Authors: Tay, B.K., Zhao, Z.W., Chua, D.H.C.
Other Authors: MATERIALS SCIENCE AND ENGINEERING
Format: Review
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/86985
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Institution: National University of Singapore