Review of metal oxide films deposited by filtered cathodic vacuum arc technique
Materials Science and Engineering R: Reports
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Main Authors: | Tay, B.K., Zhao, Z.W., Chua, D.H.C. |
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Other Authors: | MATERIALS SCIENCE AND ENGINEERING |
Format: | Review |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/86985 |
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Institution: | National University of Singapore |
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