Review of metal oxide films deposited by filtered cathodic vacuum arc technique

Materials Science and Engineering R: Reports

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Bibliographic Details
Main Authors:	Tay, B.K., Zhao, Z.W., Chua, D.H.C.
Other Authors:	MATERIALS SCIENCE AND ENGINEERING
Format:	Review
Published:	2014
Subjects:	Filtered cathodic vacuum arc Metal oxides Microstructure Optical properties Thin films
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/86985
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-86985
record_format	dspace
spelling	sg-nus-scholar.10635-869852018-12-18T23:38:36Z Review of metal oxide films deposited by filtered cathodic vacuum arc technique Tay, B.K. Zhao, Z.W. Chua, D.H.C. MATERIALS SCIENCE AND ENGINEERING Filtered cathodic vacuum arc Metal oxides Microstructure Optical properties Thin films Materials Science and Engineering R: Reports 52 1-3 1-48 MIGIE 2014-10-07T09:57:09Z 2014-10-07T09:57:09Z 2006-05-30 Review Tay, B.K., Zhao, Z.W., Chua, D.H.C. (2006-05-30). Review of metal oxide films deposited by filtered cathodic vacuum arc technique. Materials Science and Engineering R: Reports 52 (1-3) : 1-48. ScholarBank@NUS Repository. 0927796X http://scholarbank.nus.edu.sg/handle/10635/86985 000238799100001 Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Filtered cathodic vacuum arc Metal oxides Microstructure Optical properties Thin films
spellingShingle	Filtered cathodic vacuum arc Metal oxides Microstructure Optical properties Thin films Tay, B.K. Zhao, Z.W. Chua, D.H.C. Review of metal oxide films deposited by filtered cathodic vacuum arc technique
description	Materials Science and Engineering R: Reports
author2	MATERIALS SCIENCE AND ENGINEERING
author_facet	MATERIALS SCIENCE AND ENGINEERING Tay, B.K. Zhao, Z.W. Chua, D.H.C.
format	Review
author	Tay, B.K. Zhao, Z.W. Chua, D.H.C.
author_sort	Tay, B.K.
title	Review of metal oxide films deposited by filtered cathodic vacuum arc technique
title_short	Review of metal oxide films deposited by filtered cathodic vacuum arc technique
title_full	Review of metal oxide films deposited by filtered cathodic vacuum arc technique
title_fullStr	Review of metal oxide films deposited by filtered cathodic vacuum arc technique
title_full_unstemmed	Review of metal oxide films deposited by filtered cathodic vacuum arc technique
title_sort	review of metal oxide films deposited by filtered cathodic vacuum arc technique
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/86985
_version_	1681090081571471360

Review of metal oxide films deposited by filtered cathodic vacuum arc technique

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