Scandium and Boron co-alloyed AlN thin films with improved piezoelectric and ferroelectric properties
This study explores the optimization of piezoelectric and ferroelectric properties of doped aluminum nitride (AlN) films, specifically investigating the effects of scandium (Sc) and boron (B) doping. The experimental setup involves depositing a Metal-Ferroelectric-Metal (MFM) thin film stack on 200m...
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| Format: | Final Year Project |
| Language: | English |
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Nanyang Technological University
2024
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| Online Access: | https://hdl.handle.net/10356/175965 |
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| Institution: | Nanyang Technological University |
| Language: | English |