Scandium and Boron co-alloyed AlN thin films with improved piezoelectric and ferroelectric properties

• Main Author: Wu, Cheng Lung
• Other Authors: Nripan Mathews
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2024
• Subjects: Engineering; Piezoelectricity; Ferroelectricity; Aluminium scandium nitride; MEMS device; Thin film deposition; PVD reactive sputtering
• Online Access: https://hdl.handle.net/10356/175965
• Institution: Nanyang Technological University

This study explores the optimization of piezoelectric and ferroelectric properties of doped aluminum nitride (AlN) films, specifically investigating the effects of scandium (Sc) and boron (B) doping. The experimental setup involves depositing a Metal-Ferroelectric-Metal (MFM) thin film stack on 200m...