Atomic-level insight into process and mechanism of ion beam machining on aluminum optical surface

• Main Authors: Du, Chunyang, Dai, Yifan, Hu, Hao, Guan, Chaoliang, Liu, Junfeng, Lai, Tao, Tian, Yuanyuan
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2024
• Subjects: Engineering; Ion beam sputtering; Surface morphology
• Online Access: https://hdl.handle.net/10356/176064
• Institution: Nanyang Technological University

Polycrystalline Al workpieces go through a complex surface atom sputtering and surface/subsurface atom diffusion throughout the ion beam machining process that plays a critical role in determining machining quality of optical mirror surfaces. Here, we leverage molecular dynamics method for the first...