Atomic-level insight into process and mechanism of ion beam machining on aluminum optical surface

• Main Authors: Du, Chunyang, Dai, Yifan, Hu, Hao, Guan, Chaoliang, Liu, Junfeng, Lai, Tao, Tian, Yuanyuan
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Article
• 語言: English
• 出版: 2024
• 主題: Engineering; Ion beam sputtering; Surface morphology
• 在線閱讀: https://hdl.handle.net/10356/176064
• 機構: Nanyang Technological University

Polycrystalline Al workpieces go through a complex surface atom sputtering and surface/subsurface atom diffusion throughout the ion beam machining process that plays a critical role in determining machining quality of optical mirror surfaces. Here, we leverage molecular dynamics method for the first...