Topology-preserving deep learning for structural integrity in optical semiconductor characterization at deeply subwavelength resolution

• Main Author: Peng, Yuhan
• Other Authors: Xia Kelin
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2025
• Subjects: Mathematical Sciences; Topological data analysis; Persistent homology; Scientific deep learning; Optical super-resolution imaging
• Online Access: https://hdl.handle.net/10356/184463
• Institution: Nanyang Technological University

As semiconductor devices continue to shrink to the nanoscale, ensuring their structural accuracy becomes increasingly critical. Optical imaging techniques play a key role in defect detection in semiconductor manufacturing. However, these optical techniques are fundamentally limited by the diffractio...