Topology-preserving deep learning for structural integrity in optical semiconductor characterization at deeply subwavelength resolution

• المؤلف الرئيسي: Peng, Yuhan
• مؤلفون آخرون: Xia Kelin
• التنسيق: Final Year Project
• اللغة: English
• منشور في: Nanyang Technological University 2025
• الموضوعات: Mathematical Sciences; Topological data analysis; Persistent homology; Scientific deep learning; Optical super-resolution imaging
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/184463
• المؤسسة: Nanyang Technological University

As semiconductor devices continue to shrink to the nanoscale, ensuring their structural accuracy becomes increasingly critical. Optical imaging techniques play a key role in defect detection in semiconductor manufacturing. However, these optical techniques are fundamentally limited by the diffractio...