Synthesis of single walled carbon nanotubes by remote plasma enhanced chemical vapor deposition
Single walled carbon nanotubes (SWNTs), due to their unique electronic and mechanical properties have been receiving much attention especially from electronic industry for a wide range of application. The project was divided into 2 parts. The first part was the study on the effects of synthesis p...
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Format: | Final Year Project |
Language: | English |
Published: |
2009
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Online Access: | http://hdl.handle.net/10356/18606 |
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Institution: | Nanyang Technological University |
Language: | English |
Summary: | Single walled carbon nanotubes (SWNTs), due to their unique electronic and mechanical
properties have been receiving much attention especially from electronic industry for a wide
range of application. The project was divided into 2 parts. The first part was the study on the
effects of synthesis parameters on the growth of SWNTs by chemical vapor deposition method
(CVD) using catalyst Co-MCM-41 and CoMo. Through the study, it was found the synthesis
parameters have a great influence on the quality, structure and diameter uniformity of SWNTs
synthesized. Characterization techniques involved are Raman spectroscopy, photoluminescence
and absorption spectroscopy. The second part is the study on the growth of SWNTs by plasma
enhanced chemical vapor deposition method (PECVD). The purpose is to synthesize SWNTs at
lower temperature for its integration into current complementary metal-oxide-silicon (CMOS)
technology. SWNTs were successfully synthesized at temperature of 525⁰C with plasma
enhancement in this project. Other synthesis parameter such as plasma power, growth
temperature and carbon source pressure were also investigated. |
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