Synthesis of single walled carbon nanotubes by remote plasma enhanced chemical vapor deposition

• Main Author: Peng, Weng Kuan.
• Other Authors: Chen Yuan
• Format: Final Year Project
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Nanotechnology
• Online Access: http://hdl.handle.net/10356/18606
• Institution: Nanyang Technological University

Single walled carbon nanotubes (SWNTs), due to their unique electronic and mechanical properties have been receiving much attention especially from electronic industry for a wide range of application. The project was divided into 2 parts. The first part was the study on the effects of synthesis parameters on the growth of SWNTs by chemical vapor deposition method (CVD) using catalyst Co-MCM-41 and CoMo. Through the study, it was found the synthesis parameters have a great influence on the quality, structure and diameter uniformity of SWNTs synthesized. Characterization techniques involved are Raman spectroscopy, photoluminescence and absorption spectroscopy. The second part is the study on the growth of SWNTs by plasma enhanced chemical vapor deposition method (PECVD). The purpose is to synthesize SWNTs at lower temperature for its integration into current complementary metal-oxide-silicon (CMOS) technology. SWNTs were successfully synthesized at temperature of 525⁰C with plasma enhancement in this project. Other synthesis parameter such as plasma power, growth temperature and carbon source pressure were also investigated.