Characterization of sputtered, doped BaTiO3 films for multiferroic applications

• 主要作者: Haghighi, Sara Borhani
• 其他作者: Thirumany Sritharan
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2009
• 主題: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• 在線閱讀: http://hdl.handle.net/10356/18717

In this study, single phase Co-doped BaTiO3 (BTO) thin films were fabricated by magnetron sputtering on three different substrates namely, SiO2/Si, Pt/Ti/SiO2/Si and LaxSr1-xMnO3 (LSMO). The effects of sputtering parameters such as rf power, deposition pressure, oxygen content in the environment on...