Diamond film growth by microwave plasma enhanced chemical vapour deposition

• المؤلف الرئيسي: Tan, Fong Hock.
• مؤلفون آخرون: Jaeshin, Ahn
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2009
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/19689
• المؤسسة: Nanyang Technological University

Diamond particles and continuous films have been successfully grown by Microwave Plasma Enhanced Chemical Vapour Deposition (MPECVD). The particles and films were characterised using scanning electron microscopy (SEM), atomic force microscopy (AFM) and Raman spectroscopy. Current-Voltage measurement...