Morphological study of (100) textured and epitaxially textured diamond thin films

(100) textured diamond film and (100) epitaxially textured diamond films are one of the most interesting areas of current CVD diamond research. These films possess better crystal quality than other CVD diamond film, such as (110) textured, (111) textured and randomly oriented polycrystalline diamond...

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Main Author: Yang, Baoxiong
Other Authors: Jaeshin Ahn
Format: Theses and Dissertations
Language:English
Published: 2009
Subjects:
Online Access:http://hdl.handle.net/10356/19701
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-197012023-07-04T15:29:59Z Morphological study of (100) textured and epitaxially textured diamond thin films Yang, Baoxiong Jaeshin Ahn School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials (100) textured diamond film and (100) epitaxially textured diamond films are one of the most interesting areas of current CVD diamond research. These films possess better crystal quality than other CVD diamond film, such as (110) textured, (111) textured and randomly oriented polycrystalline diamond films. They have a smoother surface than other types of CVD diamond film even at film thickness of a few hundred microns. Therefore, they might fiilfiU the requirements for CVD diamond to be applied in IR optics and even in the visible light range. Further, recent research has demonstrated considerable improvements in electronic properties in doped (100) epitaxially textured diamond film in comparison to other types of polycrystalline diamond film. However, fiorther study is needed to have a better understanding of the mechanisms of textured growth and epitaxially textured growth and also to refme the growth technique. Master of Engineering 2009-12-14T06:22:32Z 2009-12-14T06:22:32Z 1995 1995 Thesis http://hdl.handle.net/10356/19701 en Nanyang Technological University 135 p. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Yang, Baoxiong
Morphological study of (100) textured and epitaxially textured diamond thin films
description (100) textured diamond film and (100) epitaxially textured diamond films are one of the most interesting areas of current CVD diamond research. These films possess better crystal quality than other CVD diamond film, such as (110) textured, (111) textured and randomly oriented polycrystalline diamond films. They have a smoother surface than other types of CVD diamond film even at film thickness of a few hundred microns. Therefore, they might fiilfiU the requirements for CVD diamond to be applied in IR optics and even in the visible light range. Further, recent research has demonstrated considerable improvements in electronic properties in doped (100) epitaxially textured diamond film in comparison to other types of polycrystalline diamond film. However, fiorther study is needed to have a better understanding of the mechanisms of textured growth and epitaxially textured growth and also to refme the growth technique.
author2 Jaeshin Ahn
author_facet Jaeshin Ahn
Yang, Baoxiong
format Theses and Dissertations
author Yang, Baoxiong
author_sort Yang, Baoxiong
title Morphological study of (100) textured and epitaxially textured diamond thin films
title_short Morphological study of (100) textured and epitaxially textured diamond thin films
title_full Morphological study of (100) textured and epitaxially textured diamond thin films
title_fullStr Morphological study of (100) textured and epitaxially textured diamond thin films
title_full_unstemmed Morphological study of (100) textured and epitaxially textured diamond thin films
title_sort morphological study of (100) textured and epitaxially textured diamond thin films
publishDate 2009
url http://hdl.handle.net/10356/19701
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