Investigation of silicon nanowires photodetector

• Main Author: Foo, Kai Lin.
• Other Authors: Rusli
• Format: Theses and Dissertations
• Language: English
• Published: 2010
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: http://hdl.handle.net/10356/21197
• Institution: Nanyang Technological University

Silicon nanowires (SiNWs) research has intensified over the past decade with the advancement in nanowires fabrication technology. The objectives of this study are to (i) develop a fabrication process to obtain top-down SiNWs with cross-sectional dimensions of 10 nm or less, (ii) characterize the phy...