High-resolution UV and e-beam lithography for diffractive optics

• Main Author: Yuan, Xiaocong.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: http://hdl.handle.net/10356/2908
• Institution: Nanyang Technological University

Diffractive optical elements (DOEs) are a class of optical components that are used in a diverse range of fields such as telecommunications, optical computing, consumer electronics, laser material processing and the biomedical sciences, to manipulate light through micro-optical systems. The advantag...