High-resolution UV and e-beam lithography for diffractive optics

• المؤلف الرئيسي: Yuan, Xiaocong.
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: Research Report
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/2908

Diffractive optical elements (DOEs) are a class of optical components that are used in a diverse range of fields such as telecommunications, optical computing, consumer electronics, laser material processing and the biomedical sciences, to manipulate light through micro-optical systems. The advantag...