Fabrication and characterisation of microelectronics materials and devices

To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications.

Saved in:

Bibliographic Details
Main Author:	Lam, Yee Loy
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Online Access:	http://hdl.handle.net/10356/3005
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3005
record_format	dspace
spelling	sg-ntu-dr.10356-30052023-03-04T03:19:36Z Fabrication and characterisation of microelectronics materials and devices Lam, Yee Loy School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications. RGM 21/96 2008-09-17T09:18:40Z 2008-09-17T09:18:40Z 1999 1999 Research Report http://hdl.handle.net/10356/3005 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Lam, Yee Loy Fabrication and characterisation of microelectronics materials and devices
description	To develop a suitable photonics material and a reliable fabrication process for channel waveguide and grating devices to lead to further development of other passive devices for microelectronics (photonics) applications.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Lam, Yee Loy
format	Research Report
author	Lam, Yee Loy
author_sort	Lam, Yee Loy
title	Fabrication and characterisation of microelectronics materials and devices
title_short	Fabrication and characterisation of microelectronics materials and devices
title_full	Fabrication and characterisation of microelectronics materials and devices
title_fullStr	Fabrication and characterisation of microelectronics materials and devices
title_full_unstemmed	Fabrication and characterisation of microelectronics materials and devices
title_sort	fabrication and characterisation of microelectronics materials and devices
publishDate	2008
url	http://hdl.handle.net/10356/3005
_version_	1759853399473389568

Fabrication and characterisation of microelectronics materials and devices

Similar Items