Internal microprobing at VLSI chips

• Main Authors: Liu, Po Ching., Chin, Edward Hsi Ling.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Integrated circuits
• Online Access: http://hdl.handle.net/10356/3032
• Institution: Nanyang Technological University

Microprobing is the technique suitable to detect and measureinternal signals inside the VLSI chips. The setup comprises of a microprobing station, micromanipulators and probes. DC (static) and AC (dynamic) measurements on some VLSI chips to prove the establishment and application of microprobing tec...