Strain relaxation in SiGe/Si heteroepitaxy
163 p.
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2010
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| Online Access: | https://hdl.handle.net/10356/35953 |
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| Institution: | Nanyang Technological University |
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sg-ntu-dr.10356-359532023-03-04T16:47:45Z Strain relaxation in SiGe/Si heteroepitaxy Wong, Lydia Helena Wong Chee Cheong School of Materials Science & Engineering DRNTU::Engineering::Materials::Photonics and optoelectronics materials 163 p. Heteroepitaxy of lattice-mismatched materials are important for both optoelectronic and microelectronic applications. Within the community of research in heteroepitaxy, the long-standing goal is to obtain strain relaxation while minimizing the generation of defects which often leads to device degradation. DOCTOR OF PHILOSOPHY (MSE) 2010-04-23T02:14:38Z 2010-04-23T02:14:38Z 2007 2007 Thesis Wong, L. H. (2007). Strain relaxation in SiGe/Si heteroepitaxy. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/35953 10.32657/10356/35953 application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| topic |
DRNTU::Engineering::Materials::Photonics and optoelectronics materials |
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DRNTU::Engineering::Materials::Photonics and optoelectronics materials Wong, Lydia Helena Strain relaxation in SiGe/Si heteroepitaxy |
| description |
163 p. |
| author2 |
Wong Chee Cheong |
| author_facet |
Wong Chee Cheong Wong, Lydia Helena |
| format |
Theses and Dissertations |
| author |
Wong, Lydia Helena |
| author_sort |
Wong, Lydia Helena |
| title |
Strain relaxation in SiGe/Si heteroepitaxy |
| title_short |
Strain relaxation in SiGe/Si heteroepitaxy |
| title_full |
Strain relaxation in SiGe/Si heteroepitaxy |
| title_fullStr |
Strain relaxation in SiGe/Si heteroepitaxy |
| title_full_unstemmed |
Strain relaxation in SiGe/Si heteroepitaxy |
| title_sort |
strain relaxation in sige/si heteroepitaxy |
| publishDate |
2010 |
| url |
https://hdl.handle.net/10356/35953 |
| _version_ |
1759858141275619328 |