Modeling and design of high sensitive PZT microsystems
72 p.
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2010
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| Online Access: | http://hdl.handle.net/10356/36038 |
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| Institution: | Nanyang Technological University |
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sg-ntu-dr.10356-360382023-03-11T17:00:08Z Modeling and design of high sensitive PZT microsystems Uzair Ahmed Miao Jianmin School of Mechanical and Aerospace Engineering DRNTU::Engineering::Manufacturing::Product design 72 p. Design of microsystems involves knowledge of mechanical, electrical and material domains. To start with modeling and design of microsystems an analytical approach along with FEM is essential. For our objective we have carried out an analytical study of the tip deflection for piezoelectric micro-actuator, along with the design analysis using FEA commercial tool ANSYS®. We have observed the relation between sensitivity and tip deflection by introducing IDE (Inter Digitated Electrode) to induce in-plane piezoelectric effect. The comparative study between transverse and longitudinal mode has been conducted by considering the silicon thickness as the effective parameter. The simulated and analytical results show that the longitudinal mode is several times higher than the conventional transverse mode. In later part, we have also demonstrated the fabrication process of our device using MEMS design tool IntelliFab®. Master of Science (Micro Electro Mechanical Systems Engineering) 2010-04-23T02:24:48Z 2010-04-23T02:24:48Z 2007 2007 Thesis http://hdl.handle.net/10356/36038 application/pdf |
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Nanyang Technological University |
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Asia |
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Singapore Singapore |
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DRNTU::Engineering::Manufacturing::Product design |
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DRNTU::Engineering::Manufacturing::Product design Uzair Ahmed Modeling and design of high sensitive PZT microsystems |
| description |
72 p. |
| author2 |
Miao Jianmin |
| author_facet |
Miao Jianmin Uzair Ahmed |
| format |
Theses and Dissertations |
| author |
Uzair Ahmed |
| author_sort |
Uzair Ahmed |
| title |
Modeling and design of high sensitive PZT microsystems |
| title_short |
Modeling and design of high sensitive PZT microsystems |
| title_full |
Modeling and design of high sensitive PZT microsystems |
| title_fullStr |
Modeling and design of high sensitive PZT microsystems |
| title_full_unstemmed |
Modeling and design of high sensitive PZT microsystems |
| title_sort |
modeling and design of high sensitive pzt microsystems |
| publishDate |
2010 |
| url |
http://hdl.handle.net/10356/36038 |
| _version_ |
1761781641970188288 |