Design, modeling and control of an XYZ flexure parallel mechanism with large motion range and decoupled kinematic structure

With the advantages of no backlash, no accumulative error and compatibility with acuum and clean environment, flexure parallel mechanisms (FPMs) have been employed in high-precision positioning systems in optics, micro/nano scale metrology and manufacturing, semiconductor production and biology appl...

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Bibliographic Details
Main Author: Tang, Xue Yan
Other Authors: Chen, I-Ming
Format: Theses and Dissertations
Language:English
Published: 2008
Subjects:
Online Access:https://hdl.handle.net/10356/13491
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Institution: Nanyang Technological University
Language: English