Design, modeling and control of an XYZ flexure parallel mechanism with large motion range and decoupled kinematic structure
With the advantages of no backlash, no accumulative error and compatibility with acuum and clean environment, flexure parallel mechanisms (FPMs) have been employed in high-precision positioning systems in optics, micro/nano scale metrology and manufacturing, semiconductor production and biology appl...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2008
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| Online Access: | https://hdl.handle.net/10356/13491 |
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| Institution: | Nanyang Technological University |
| Language: | English |