Design, modeling and control of an XYZ flexure parallel mechanism with large motion range and decoupled kinematic structure

• Main Author: Tang, Xue Yan
• Other Authors: Chen, I-Ming
• Format: Theses and Dissertations
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Product design
• Online Access: https://hdl.handle.net/10356/13491
• Institution: Nanyang Technological University

With the advantages of no backlash, no accumulative error and compatibility with acuum and clean environment, flexure parallel mechanisms (FPMs) have been employed in high-precision positioning systems in optics, micro/nano scale metrology and manufacturing, semiconductor production and biology appl...