Design, modeling and control of an XYZ flexure parallel mechanism with large motion range and decoupled kinematic structure

• المؤلف الرئيسي: Tang, Xue Yan
• مؤلفون آخرون: Chen, I-Ming
• التنسيق: Theses and Dissertations
• اللغة: English
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Manufacturing::Product design
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/13491
• المؤسسة: Nanyang Technological University

With the advantages of no backlash, no accumulative error and compatibility with acuum and clean environment, flexure parallel mechanisms (FPMs) have been employed in high-precision positioning systems in optics, micro/nano scale metrology and manufacturing, semiconductor production and biology appl...