Deposition of site-specific metallic nanostructures with focused ion beam
64 p.
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2010
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| Online Access: | http://hdl.handle.net/10356/36041 |
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| Institution: | Nanyang Technological University |
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sg-ntu-dr.10356-360412023-03-11T16:59:29Z Deposition of site-specific metallic nanostructures with focused ion beam Wang, Fang Zhou Wei School of Mechanical and Aerospace Engineering DRNTU::Engineering::Manufacturing 64 p. Over the years small structures, as microscale or even nanoscale. have gained great focus and passion for recent and future technologies. But it is not easy to perform site-specific fabrication precisely using conventional process method. This project aims to explore use of focused ion beam (FIB), as a tool to deposit metallic nanodots and nanostructures at specific sites on substrates to modify device, make use of interconnections for integrated circuit application. Master of Science (Mechanics & Processing of Materials) 2010-04-23T02:24:56Z 2010-04-23T02:24:56Z 2007 2007 Thesis http://hdl.handle.net/10356/36041 application/pdf |
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Singapore Singapore |
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DRNTU::Engineering::Manufacturing Wang, Fang Deposition of site-specific metallic nanostructures with focused ion beam |
| description |
64 p. |
| author2 |
Zhou Wei |
| author_facet |
Zhou Wei Wang, Fang |
| format |
Theses and Dissertations |
| author |
Wang, Fang |
| author_sort |
Wang, Fang |
| title |
Deposition of site-specific metallic nanostructures with focused ion beam |
| title_short |
Deposition of site-specific metallic nanostructures with focused ion beam |
| title_full |
Deposition of site-specific metallic nanostructures with focused ion beam |
| title_fullStr |
Deposition of site-specific metallic nanostructures with focused ion beam |
| title_full_unstemmed |
Deposition of site-specific metallic nanostructures with focused ion beam |
| title_sort |
deposition of site-specific metallic nanostructures with focused ion beam |
| publishDate |
2010 |
| url |
http://hdl.handle.net/10356/36041 |
| _version_ |
1761781604393418752 |