Fabrication of 3D microstructures using focused ion beam milling

This research project looked into the possibility of developing the real 3D cavities using focused ion beam (FIB) milling.

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Bibliographic Details
Main Author: Loo, Yee Wei.
Other Authors: Ngoi, Bryan Kok Ann
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/6101
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Institution: Nanyang Technological University