Fabrication of 3D microstructures using focused ion beam milling
This research project looked into the possibility of developing the real 3D cavities using focused ion beam (FIB) milling.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/6101 |
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| Institution: | Nanyang Technological University |