Fabrication of 3D microstructures using focused ion beam milling
This research project looked into the possibility of developing the real 3D cavities using focused ion beam (FIB) milling.
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| Format: | Theses and Dissertations |
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2008
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| Online Access: | http://hdl.handle.net/10356/6101 |
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| Institution: | Nanyang Technological University |
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sg-ntu-dr.10356-61012023-03-11T17:09:18Z Fabrication of 3D microstructures using focused ion beam milling Loo, Yee Wei. Ngoi, Bryan Kok Ann School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing This research project looked into the possibility of developing the real 3D cavities using focused ion beam (FIB) milling. Master of Engineering (MPE) 2008-09-17T11:06:46Z 2008-09-17T11:06:46Z 2003 2003 Thesis http://hdl.handle.net/10356/6101 Nanyang Technological University application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| topic |
DRNTU::Engineering::Manufacturing |
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DRNTU::Engineering::Manufacturing Loo, Yee Wei. Fabrication of 3D microstructures using focused ion beam milling |
| description |
This research project looked into the possibility of developing the real 3D cavities using focused ion beam (FIB) milling. |
| author2 |
Ngoi, Bryan Kok Ann |
| author_facet |
Ngoi, Bryan Kok Ann Loo, Yee Wei. |
| format |
Theses and Dissertations |
| author |
Loo, Yee Wei. |
| author_sort |
Loo, Yee Wei. |
| title |
Fabrication of 3D microstructures using focused ion beam milling |
| title_short |
Fabrication of 3D microstructures using focused ion beam milling |
| title_full |
Fabrication of 3D microstructures using focused ion beam milling |
| title_fullStr |
Fabrication of 3D microstructures using focused ion beam milling |
| title_full_unstemmed |
Fabrication of 3D microstructures using focused ion beam milling |
| title_sort |
fabrication of 3d microstructures using focused ion beam milling |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/6101 |
| _version_ |
1761781462233776128 |