Fabrication of silicon microstructures using a high energy ion beam

• Main Authors: Teo, E.J., Liu, M.H., Breese, M.B.H., Tavernier, E.P., Bettiol, A.A., Blackwood, D.J., Watt, F.
• 其他作者: PHYSICS
• 格式: Conference or Workshop Item
• 出版: 2014
• 主題: Electrochemical etching; Ion accelerator; Porous silicon; Proton beam writing; Silicon micromachining
• 在線閱讀: http://scholarbank.nus.edu.sg/handle/10635/98711

10.1117/12.524314