Fabrication of silicon microstructures using a high energy ion beam

• Main Authors: Teo, E.J., Liu, M.H., Breese, M.B.H., Tavernier, E.P., Bettiol, A.A., Blackwood, D.J., Watt, F.
• Other Authors: MATERIALS SCIENCE
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Electrochemical etching; Ion accelerator; Porous silicon; Proton beam writing; Silicon micromachining
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98711
• Institution: National University of Singapore

10.1117/12.524314