Fabrication of smooth silicon optical devices using proton beam writing

Fabrication of smooth silicon optical devices using proton beam writing

10.1016/j.nimb.2011.02.015

Saved in:
Bibliographic Details
Main Authors: Teo, E.J., Bettiol, A.A., Xiong, B.Q.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Electrochemical etching
Optical devices
Porous silicon
Proton beam writing
Silicon photonics
Waveguides
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98713
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/98713

Similar Items