Fabrication of smooth silicon optical devices using proton beam writing

• Main Authors: Teo, E.J., Bettiol, A.A., Xiong, B.Q.
• Other Authors: PHYSICS
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Electrochemical etching; Optical devices; Porous silicon; Proton beam writing; Silicon photonics; Waveguides
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/98713
• Institution: National University of Singapore

10.1016/j.nimb.2011.02.015