A progress review of proton beam writing applications in microphotonics

10.1016/j.nimb.2005.01.084

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Bibliographic Details
Main Authors: Bettiol, A.A., Sum, T.C., Cheong, F.C., Sow, C.H., Venugopal Rao, S., Van Kan, J.A., Teo, E.J., Ansari, K., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/53267
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Institution: National University of Singapore