A progress review of proton beam writing applications in microphotonics
10.1016/j.nimb.2005.01.084
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Main Authors: | Bettiol, A.A., Sum, T.C., Cheong, F.C., Sow, C.H., Venugopal Rao, S., Van Kan, J.A., Teo, E.J., Ansari, K., Watt, F. |
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Other Authors: | PHYSICS |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/53267 |
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Institution: | National University of Singapore |
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