Proton beam fabrication of nickel stamps for nanoimprint lithography

10.1016/j.nimb.2005.01.091

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Bibliographic Details
Main Authors: Ansari, K., Shao, P.G., Van Kan, J.A., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98848
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Institution: National University of Singapore