High aspect ratio PDMS replication through proton beam fabricated Ni masters

High aspect ratio PDMS replication through proton beam fabricated Ni masters

10.1016/j.nimb.2007.02.046

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Bibliographic Details
Main Authors: van Kan, J.A., Wang, L.P., Shao, P.G., Bettiol, A.A., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
High aspect ratio
Ni stamps
PDMS
Proton beam writing
Soft lithography
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96778
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/96778

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