Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography

Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography

10.1016/j.apsusc.2011.10.014

Saved in:
Bibliographic Details
Main Authors: Malar, P., Zhao, J., Van Kan, J.A.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
Ni mould fabrication
Proton beam writing
UV lithography
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98704
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/98704

Similar Items