Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography

10.1016/j.apsusc.2011.10.014

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Bibliographic Details
Main Authors:	Malar, P., Zhao, J., Van Kan, J.A.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Ni mould fabrication Proton beam writing UV lithography
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98704
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98704
record_format	dspace
spelling	sg-nus-scholar.10635-987042023-10-26T22:00:17Z Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography Malar, P. Zhao, J. Van Kan, J.A. PHYSICS Ni mould fabrication Proton beam writing UV lithography 10.1016/j.apsusc.2011.10.014 Applied Surface Science 258 9 4191-4194 ASUSE 2014-10-16T09:50:24Z 2014-10-16T09:50:24Z 2012-02-15 Conference Paper Malar, P., Zhao, J., Van Kan, J.A. (2012-02-15). Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography. Applied Surface Science 258 (9) : 4191-4194. ScholarBank@NUS Repository. https://doi.org/10.1016/j.apsusc.2011.10.014 01694332 http://scholarbank.nus.edu.sg/handle/10635/98704 000300455200018 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Ni mould fabrication Proton beam writing UV lithography
spellingShingle	Ni mould fabrication Proton beam writing UV lithography Malar, P. Zhao, J. Van Kan, J.A. Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography
description	10.1016/j.apsusc.2011.10.014
author2	PHYSICS
author_facet	PHYSICS Malar, P. Zhao, J. Van Kan, J.A.
format	Conference or Workshop Item
author	Malar, P. Zhao, J. Van Kan, J.A.
author_sort	Malar, P.
title	Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography
title_short	Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography
title_full	Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography
title_fullStr	Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography
title_full_unstemmed	Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography
title_sort	fabrication of metallic stamps for injection moulding applications by combining proton beam writing and uv lithography
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98704
_version_	1781786933291122688

Fabrication of metallic stamps for injection moulding applications by combining proton beam writing and UV lithography

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